Microstructure and mechanical properties of superhard Ti-B-C-N films deposited by dc unbalanced magnetron sputtering.

Autor:	Park, In-Wook, Kim, Kwang Ho, Kunrath, Augusto O., Zhong, Dalong, Moore, John J., Voevodin, A. A., Levashov, E. A.
Zdroj:	Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures; 2005, Vol. 23 Issue 2, p588-593, 6p
Databáze:	Complementary Index
Externí odkaz:	Zobrazit plný text záznamu