Nanometer gap measurement and verification via the chirped-Talbot effect.
| Autor: | Moon, Euclid E., Chen, Lynn, Everett, Patrick N., Mondol, Mark K., Smith, Henry I. |
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| Zdroj: | Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures; 2004, Vol. 22 Issue 6, p3378-3381, 4p |
| Databáze: | Complementary Index |
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