Observation and evaluation of flaked particle behavior in magnetically enhanced reactive ion etching equipment using a dipole ring magnet.
| Autor: | Moriya, Tsuyoshi, Nagaike, Hiroshi, Denpoh, Kazuki, Morimoto, Tamotsu, Aomori, Masaru, Kawaguchi, Shinichi, Shimada, Manabu, Okuyama, Kikuo |
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| Zdroj: | Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures; 2004, Vol. 22 Issue 4, p1688-1693, 6p |
| Databáze: | Complementary Index |
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