Fabrication of SiC microelectromechanical systems using one-step dry etching.

Autor:	Jiang, Liudi, Cheung, R., Hassan, M., Harris, A. J., Burdess, J. S., Zorman, C. A., Mehregany, M.
Zdroj:	Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures; 2003, Vol. 21 Issue 6, p2998-3001, 4p
Databáze:	Complementary Index
Externí odkaz:	Zobrazit plný text záznamu