Optimization and characterization of III-V surface cleaning.
| Autor: | Liu, Zhi, Sun, Yun, Machuca, Francisco, Pianetta, Piero, Spicer, William E., Pease, R. F. W. |
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| Zdroj: | Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures; 2003, Vol. 21 Issue 4, p1953-1958, 6p |
| Databáze: | Complementary Index |
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