Investigation of ion-beam-sputtered Nb-Ti thin films by complementary use of backscattering and nuclear-reaction microanalysis.

Autor: Bouchier, Daniel, Gautherin, Guy, Agius, Bernard, Rigo, Serge
Zdroj: Journal of Applied Physics; Dec1978, Vol. 49 Issue 12, p5896-5902, 7p
Databáze: Complementary Index