Beam dynamics of a double-gap acceleration cell for ion implantation with multiple atomic species.

Autor: Wadlinger, E. A., Lysenko, W. P., Rusnak, B., Saadatmand, K.
Zdroj: AIP Conference Proceedings; Feb1997, Vol. 392 Issue 1, p941-944, 4p
Databáze: Complementary Index