Ion-backscattering analysis of tungsten films on heavily doped SiGe.
| Autor: | Borders, J. A., Sweet, J. N. |
|---|---|
| Zdroj: | Journal of Applied Physics; Sep1972, Vol. 43 Issue 9, p3803-3808, 6p |
| Databáze: | Complementary Index |
| Externí odkaz: |
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| Autor: | Borders, J. A., Sweet, J. N. |
|---|---|
| Zdroj: | Journal of Applied Physics; Sep1972, Vol. 43 Issue 9, p3803-3808, 6p |
| Databáze: | Complementary Index |
| Externí odkaz: |
|