Optical spectroscopy during reactive ion beam etching of Si and Al targets.
| Autor: | Dzioba, Steven, Naguib, H. M. |
|---|---|
| Zdroj: | Journal of Applied Physics; Jun1982, Vol. 53 Issue 6, p4389-4394, 6p |
| Databáze: | Complementary Index |
| Externí odkaz: |
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| Autor: | Dzioba, Steven, Naguib, H. M. |
|---|---|
| Zdroj: | Journal of Applied Physics; Jun1982, Vol. 53 Issue 6, p4389-4394, 6p |
| Databáze: | Complementary Index |
| Externí odkaz: |
|