Auger electron and x-ray photoelectron spectroscopy of sputter deposited aluminum nitride.
| Autor: | Kovacich, J. A., Kasperkiewicz, J., Lichtman, D., Aita, C. R. |
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| Zdroj: | Journal of Applied Physics; Apr1984, Vol. 55 Issue 8, p2935-2939, 5p |
| Databáze: | Complementary Index |
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