Unannealed and annealed depth distributions of mercury implanted into silicon.
| Autor: | Wilson, R. G., Jamba, D. M., Hopkins, C. G., Norberg, J. C. |
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| Zdroj: | Journal of Applied Physics; Jan1984, Vol. 55 Issue 2, p327-330, 4p |
| Databáze: | Complementary Index |
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