Quantitative electron microprobe analysis of thin films on substrates with a new Monte Carlo simulation.
| Autor: | Murata, Kenji, Kotera, Masatoshi, Nagami, Koichi |
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| Zdroj: | Journal of Applied Physics; Feb1983, Vol. 54 Issue 2, p1110-1114, 5p |
| Databáze: | Complementary Index |
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