Effects of hydrogenation on lightly doped polycrystalline silicon.
| Autor: | Campbell, D. R., Hwang, J. C. M., Ohdomari, I., Frisch, M., Fitzpatrick, W. |
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| Zdroj: | Journal of Applied Physics; Nov1982, Vol. 53 Issue 11, p7454-7457, 4p |
| Databáze: | Complementary Index |
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