Silicide and Schottky barrier formation in the Ti-Si and the Ti-SiOx -Si systems.
Autor: | Taubenblatt, Marc A., Helms, C. R. |
---|---|
Zdroj: | Journal of Applied Physics; Sep1982, Vol. 53 Issue 9, p6308-6315, 8p |
Databáze: | Complementary Index |
Externí odkaz: |