Hydrogenated amorphous silicon growth by CO2 laser photodissociation of silane.
| Autor: | Bilenchi, R., Gianinoni, I., Musci, M. |
|---|---|
| Zdroj: | Journal of Applied Physics; Sep1982, Vol. 53 Issue 9, p6479-6481, 3p |
| Databáze: | Complementary Index |
| Externí odkaz: |
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| Autor: | Bilenchi, R., Gianinoni, I., Musci, M. |
|---|---|
| Zdroj: | Journal of Applied Physics; Sep1982, Vol. 53 Issue 9, p6479-6481, 3p |
| Databáze: | Complementary Index |
| Externí odkaz: |
|