Structural model of sputtered fluorinated amorphous silicon.
| Autor: | Matsumura, Hideki, Sakai, Kunihiro, Kawakyu, Yoshito, Furukawa, Seijiro |
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| Zdroj: | Journal of Applied Physics; Sep1981, Vol. 52 Issue 9, p5537-5542, 6p |
| Databáze: | Complementary Index |
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