Model of bias sputtering applied to the control of Nb film properties.
| Autor: | Kay, Eric, Heim, Gunther |
|---|---|
| Zdroj: | Journal of Applied Physics; Sep1978, Vol. 49 Issue 9, p4862-4867, 6p |
| Databáze: | Complementary Index |
| Externí odkaz: |
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| Autor: | Kay, Eric, Heim, Gunther |
|---|---|
| Zdroj: | Journal of Applied Physics; Sep1978, Vol. 49 Issue 9, p4862-4867, 6p |
| Databáze: | Complementary Index |
| Externí odkaz: |
|