The hydrogen content of plasma-deposited silicon nitride.
| Autor: | Lanford, W. A., Rand, M. J. |
|---|---|
| Zdroj: | Journal of Applied Physics; Apr1978, Vol. 49 Issue 4, p2473-2477, 5p |
| Databáze: | Complementary Index |
| Externí odkaz: |
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| Autor: | Lanford, W. A., Rand, M. J. |
|---|---|
| Zdroj: | Journal of Applied Physics; Apr1978, Vol. 49 Issue 4, p2473-2477, 5p |
| Databáze: | Complementary Index |
| Externí odkaz: |
|