Plasma etching A ''pseudo-black-box'' approach.
| Autor: | Winters, Harold F., Coburn, J. W., Kay, E. |
|---|---|
| Zdroj: | Journal of Applied Physics; Dec1977, Vol. 48 Issue 12, p4973-4983, 11p |
| Databáze: | Complementary Index |
| Externí odkaz: |
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| Autor: | Winters, Harold F., Coburn, J. W., Kay, E. |
|---|---|
| Zdroj: | Journal of Applied Physics; Dec1977, Vol. 48 Issue 12, p4973-4983, 11p |
| Databáze: | Complementary Index |
| Externí odkaz: |
|