Electron-beam effects in depth profiling measurements with Auger electron spectroscopy.
Autor: | Ahn, J., Perleberg, C. R., Wilcox, D. L., Coburn, J. W., Winters, H. F. |
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Zdroj: | Journal of Applied Physics; Oct1975, Vol. 46 Issue 10, p4581-4583, 3p |
Databáze: | Complementary Index |
Externí odkaz: |