Verification of carrier density profiles derived from spreading resistance measurements by comparing measured and calculated sheet resistance values.

Autor:	Mazur, R. G., Ramey, S. M., Hartford, C. L., Hartford, E. J., Kouno, M., Tan, L. S.
Zdroj:	AIP Conference Proceedings; Nov1998, Vol. 449 Issue 1, p226-230, 5p
Databáze:	Complementary Index
Externí odkaz:	Zobrazit plný text záznamu