Dopant characterization round-robin study performed on two-dimensional test structures fabricated at Texas Instruments.

Autor: Ukraintsev, Vladimir A., List, R. Scott, Chang, Mi-Chang, Edwards, Hal, Machala, Charles F., Martin, Richard San, Zavyalov, Vladimir, McMurray, Jeff S., Williams, Clayton C., De Wolf, Peter, Vandervorst, Wilfried, Venables, David, Neogi, Suneeta S., Ottaviani, Diana L., Kopanski, Joseph J., Marchiando, Jay F., Rennex, Brian G., Nxumalo, Jochonia N., Li, Yufei, Thomson, Douglas J.
Zdroj: AIP Conference Proceedings; Nov1998, Vol. 449 Issue 1, p741-745, 5p
Databáze: Complementary Index