High-power laser plasma sources: Soft x-ray projection lithography and other applications.
| Autor: | Kubiak, G. D., Berger, K. W., Haney, S. J., Tichenor, D. A., Stulen, R. H., Rockett, P. D., Hunter, J. A. |
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| Zdroj: | AIP Conference Proceedings; Oct1993, Vol. 288 Issue 1, p534-543, 10p |
| Databáze: | Complementary Index |
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