Deposition of 1-2-3 thin films over large areas.
Autor: | Arendt, P. N., Elliott, N. E., Muenchausen, R. E., Nastasi, M., Archuleta, T. |
---|---|
Zdroj: | AIP Conference Proceedings; Feb1989, Vol. 182 Issue 1, p45-52, 8p |
Databáze: | Complementary Index |
Externí odkaz: |