Comparison of the long time stability of some SiCO: H films and related compounds with respect to postdeposition incorporation of OH groups.
| Autor: | Bartella, J., Herwig, U. |
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| Zdroj: | Fresenius' Journal of Analytical Chemistry; 1993, Vol. 346 Issue 1-3, p351-354, 4p |
| Databáze: | Complementary Index |
| Externí odkaz: |
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