Optimization of ETV-ICP-MS conditions for the determination of multi-elements in semiconductor grade acids.

Autor: Samuel, Laly, Nakagawa, Katsuhiro, Kimijima, Tetsuya
Zdroj: Fresenius' Journal of Analytical Chemistry; 1996, Vol. 356 Issue 1, p31-36, 6p
Databáze: Complementary Index