Effect of BOE Etching Time on Wire Bonding Quality.

Autor: Tan, Cher Ming, Linggajaya, Kaufik, Er, Eddie, Chai, Vincent Siew-Heong
Předmět:
Zdroj: IEEE Transactions on Components & Packaging Technologies; Dec99, Vol. 22 Issue 4, p551, 7p, 1 Black and White Photograph, 4 Diagrams, 5 Charts, 12 Graphs
Abstrakt: Investigates the dependence of wire bond-pull strength on the morphology of the underlying polycrystalline silicon beneath the bondpad metal using atomic force microscopy (AFM). Definitions of roughness parameters; Results of the roughness from AFM; Analysis of experimental results.
Databáze: Complementary Index