Observation of an intermediate chemical state of silicon in the Si/SiO2 interface by Auger sputter profiling.
| Autor: | Helms, C. R., Strausser, Y. E., Spicer, W. E. |
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| Zdroj: | Applied Physics Letters; Oct1978, Vol. 33 Issue 8, p767-769, 3p |
| Databáze: | Complementary Index |
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