X-ray determination of strain and damage distributions in ion-implanted layers.
| Autor: | Speriosu, V. S., Glass, H. L., Kobayashi, T. |
|---|---|
| Zdroj: | Applied Physics Letters; May1979, Vol. 34 Issue 9, p539-542, 4p |
| Databáze: | Complementary Index |
| Externí odkaz: |
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| Autor: | Speriosu, V. S., Glass, H. L., Kobayashi, T. |
|---|---|
| Zdroj: | Applied Physics Letters; May1979, Vol. 34 Issue 9, p539-542, 4p |
| Databáze: | Complementary Index |
| Externí odkaz: |
|