A new technique for gettering oxygen and moisture from gases used in semiconductor processing.
| Autor: | Shealy, J. R., Woodall, J. M. |
|---|---|
| Zdroj: | Applied Physics Letters; 1982, Vol. 41 Issue 1, p88-90, 3p |
| Databáze: | Complementary Index |
| Externí odkaz: |
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| Autor: | Shealy, J. R., Woodall, J. M. |
|---|---|
| Zdroj: | Applied Physics Letters; 1982, Vol. 41 Issue 1, p88-90, 3p |
| Databáze: | Complementary Index |
| Externí odkaz: |
|