Electron kinetics of silane discharges.
| Autor: | Garscadden, A., Duke, G. L., Bailey, W. F. |
|---|---|
| Zdroj: | Applied Physics Letters; 1983, Vol. 43 Issue 11, p1012-1014, 3p |
| Databáze: | Complementary Index |
| Externí odkaz: |
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| Autor: | Garscadden, A., Duke, G. L., Bailey, W. F. |
|---|---|
| Zdroj: | Applied Physics Letters; 1983, Vol. 43 Issue 11, p1012-1014, 3p |
| Databáze: | Complementary Index |
| Externí odkaz: |
|