Effects of engineering tolerances on the error of a planar capacitance displacement sensor.

Autor: Kruchinin, M.
Zdroj: Measurement Techniques; Apr1995, Vol. 38 Issue 4, p407-410, 4p
Abstrakt: The paper discusses the effects of manufacturing tolerances on the linearity errors of a planar capacitative displacement sensor. A numerical evaluation is given together with working formulas for the effects of gap taper in the working electrodes, the curvature of the inner edges of these electrons, and taper in the outer edges. [ABSTRACT FROM AUTHOR]
Databáze: Complementary Index