XPS and SIMS investigations on plasma-treated glass surfaces.

Autor: Bartella, J., Grünwald, H., Herwig, U.
Zdroj: Microchimica Acta; 1987, Vol. 91 Issue 1-6, p365-369, 5p
Abstrakt: Commercially available float-glass samples were exposed to ion bombardment in an HF-plasma. This should form an SiO-rich layer close to the surface of the samples. From XPS-investigations it was found that treatment times between 2 and 4 min in Ar plasma lead to a pronounced depletion of alkalis. Further FAB-SIMS depth profiles gave additional information about the extension of the layers with altered stoichiometry. [ABSTRACT FROM AUTHOR]
Databáze: Complementary Index