| Autor: |
Di Li, Shrivastav, Gaurav, Geng Wang, Yang Chen, Li Lin, Oak, Stimit, Tasch, Al, Banerjee, Sanjay |
| Předmět: |
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| Zdroj: |
IEEE Transactions on Electron Devices; Jul2002, Vol. 49 Issue 7, p1172, 11p, 17 Graphs |
| Abstrakt: |
Presents computational-efficient analytical models to simulate one-dimensional (1-D) and two-dimensional (2-D) impurity and damage profiles. Requirements for a good analytical implant model; Illustration of the interpolation property of the Legendre coefficients; Discussion on 1-D and 2-D modeling. |
| Databáze: |
Complementary Index |
| Externí odkaz: |
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