A comparative materials study of magnetron ion etched GaAs using Freon-12, SiCl4 and BCl3.
Autor: | Cole, M. W., McLane, G. F., Eckart, D. W., Meyyappan, M. |
---|---|
Zdroj: | Scanning; Jul1993, Vol. 15 Issue 4, p225-231, 7p |
Databáze: | Complementary Index |
Externí odkaz: |