A comparative materials study of magnetron ion etched GaAs using Freon-12, SiCl4 and BCl3.
| Autor: | Cole, M. W., McLane, G. F., Eckart, D. W., Meyyappan, M. |
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| Zdroj: | Scanning; Jul1993, Vol. 15 Issue 4, p225-231, 7p |
| Databáze: | Complementary Index |
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