Fabrication of metrology test structures for future technology nodes using high-resolution variable-shaped e-beam direct write.
| Autor: | Szikszai, László, Jaschinsky, Philipp, Keil, Katja, Hauptmann, Marc, Mört, Manfred, Seifert, Uwe, Hohle, Christoph, Choi, Kang-Hoon, Thrum, Frank, Kretz, Johannes, Ferreras Paz, Vaeriano, den Boef, Arie |
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| Zdroj: | Proceedings of SPIE; Nov2009 Part 2, Issue 1, p72712M-72712M-10, 10p |
| Databáze: | Complementary Index |
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