RLS tradeoff vs. quantum yield of high PAG EUV resists.
| Autor: | Higgins, Craig, Antohe, Alin, Denbeaux, Greg, Kruger, Seth, Georger, Jacque, Brainard, Robert |
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| Zdroj: | Proceedings of SPIE; Nov2009, Issue 1, p727147-727147-12, 12p |
| Databáze: | Complementary Index |
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