Product-driven material characterization for improved scatterometry time-to-solution.
| Autor: | Vaid, Alok, Hartig, Carsten, Sendelbach, Matthew, Bozdog, Cornel, Kim, Hyang Kyun, Sendler, Michael, Cohen, Yoel, Kucherov, Victor, Brill, Boaz, Stepanov, Stanislav |
|---|---|
| Zdroj: | Proceedings of SPIE; Nov2009 Part 2, Issue 1, p72720V-72720V-12, 12p |
| Databáze: | Complementary Index |
| Externí odkaz: |
|