Sensitivity improvement and noise reduction of array CD mapping on memory device using inspection tool.
| Autor: | Yeo, Jeong-Ho, Cho, Byeong-Ok, Park, Jin-Hong, Hur, Jinseok, Woo, Seok-Hoon, Choi, Seungwoon, Park, Chan-Hoon |
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| Zdroj: | Proceedings of SPIE; Nov2009 Part 2, Issue 1, p72721U-72721U-8, 8p |
| Databáze: | Complementary Index |
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