Comparison of physical gate-CD with in-die at-speed non-contact measurements for bin-yield and process optimization.
| Autor: | Vickers, J. S., Galvier, J., Doedel, W., Steinbrueck, G., Borot, B., Gatefait, M., Gouraud, P., Gros, P., Johnson, G., Babazadeh, M., Pelella, M., Pakdaman, N. |
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| Zdroj: | Proceedings of SPIE; Nov2009 Part 2, Issue 1, p72724C-72724C-8, 8p |
| Databáze: | Complementary Index |
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