Engine for characterization of defects, overlay, and critical dimension control for double exposure processes for advanced logic nodes.
| Autor: | Holmes, Steven, Koay, Chiew-Seng, Petrillo, Karen, Chen, Kuang-Jung, Colburn, Matthew E., Cantone, Jason, Ueda, Kenichi, Metz, Andrew, Dunn, Shannon, van Dommelen, Youri, Crouse, Michael, Galloway, Judy, Schmitt-Weaver, Emil, Jiang, Aiquin, Routh, Robert, Tang, Cherry, Slezak, Mark, Kini, Sumanth, DiBiase, Tony |
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| Zdroj: | Proceedings of SPIE; Nov2009, Issue 1, p727305-727305-13, 13p |
| Databáze: | Complementary Index |
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