Achieving overlay budgets for double patterning.
| Autor: | Hazelton, Andrew J., Magome, Nobutaka, Wakamoto, Shinji, Tokui, Akira, Lapeyre, Céline, Barnola, Sébastien, Jullien, Guillaume, Salvetat, Vincent |
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| Zdroj: | Proceedings of SPIE; Nov2009 Part 2, Issue 1, p72740X-72740X-11, 11p |
| Databáze: | Complementary Index |
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