Improving yield through the application of process window OPC.
| Autor: | Tirapu Azpiroz, Jaione, Krasnoperova, Azalia, Siddiqui, Shahab, Settlemyer, Kenneth, Graur, Ioana, Stobert, Ian, Oberschmidt, James M. |
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| Zdroj: | Proceedings of SPIE; Nov2009, Issue 1, p727411-727411-13, 13p |
| Databáze: | Complementary Index |
| Externí odkaz: |
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