Novel approaches to meet the requirements for double patterning.
| Autor: | Ebihara, Takeaki, Yoshihara, Toshiyuki, Morohoshi, Hiroshi, Makiyama, Tadamasa, Kawanobe, Yoshio, Tsujita, Koichiro, Kojima, Toshiyuki, Takahashi, Kazuhiro |
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| Zdroj: | Proceedings of SPIE; Nov2009 Part 2, Issue 1, p72741J-72741J-8, 8p |
| Databáze: | Complementary Index |
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