Pre-OPC layout decomposition for improved image fidelity.
| Autor: | Abdelwahed, Shady, Fathy, Rami, Kang, Jae Hyun, Kim, Jong Doo, Kim, Youngmi |
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| Zdroj: | Proceedings of SPIE; Nov2009 Part 2, Issue 1, p72742I-72742I-7, 7p |
| Databáze: | Complementary Index |
| Externí odkaz: |
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