Directional 2D functions as models for fast layout pattern transfer verification.
| Autor: | Torres, J. Andres, Hofmann, Mark, Otto, Oberdan |
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| Zdroj: | Proceedings of SPIE; Nov2009 Part 2, Issue 1, p72750N-72750N-9, 9p |
| Databáze: | Complementary Index |
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