Evaluation of an e-beam correction strategy for compensation of EUVL mask non-flatness.
| Autor: | Orvek, Kevin, Sohn, Jaewoong, Choi, Jin, Engelstad, Roxann, Raghunathan, Sudharshanan, Zimmerman, John, Laursen, Thomas, Shusuke, Yoshitake, Shoki, Tsutomu |
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| Zdroj: | Proceedings of SPIE; Nov2009 Part 3, Issue 1, p73790Q-73790Q-9, 9p |
| Databáze: | Complementary Index |
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