Effect of scanner illumination and lens transmittance signatures on OPC accuracy.
| Autor: | Huang, Hsu-Ting, Sezginer, Apo, Tyminski, Jacek K. |
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| Zdroj: | Proceedings of SPIE; Nov2009, Issue 1, p737910-737910-11, 11p |
| Databáze: | Complementary Index |
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