The imaging performance of flash memory masks characterized with AIMS.
| Autor: | van Setten, Eelco, Wismans, Onno, Grim, Kees, Finders, Jo, Dusa, Mircea, Birkner, Robert, Richter, Rigo, Scherübl, Thomas |
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| Zdroj: | Proceedings of SPIE; Nov2009, Issue 1, p737912-737912-9, 9p |
| Databáze: | Complementary Index |
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