SiC/Al multilayers for normal incidence EUV applications.
| Autor: | Windt, David L., Bellotti, Jeffrey A. |
|---|---|
| Zdroj: | Proceedings of SPIE; Nov2009, Issue 1, p743714-743714-12, 12p |
| Databáze: | Complementary Index |
| Externí odkaz: |
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| Autor: | Windt, David L., Bellotti, Jeffrey A. |
|---|---|
| Zdroj: | Proceedings of SPIE; Nov2009, Issue 1, p743714-743714-12, 12p |
| Databáze: | Complementary Index |
| Externí odkaz: |
|